The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 22, 1989
Filed:
Feb. 12, 1988
Toshihiko Kagami, Kofu, JP;
Kazuyoshi Kobayashi, Yamanashi, JP;
Eiji Asakawa, Yamanashi, JP;
Atushi Osada, Yamanashi, JP;
Kozo Hara, Yamanashi, JP;
Yasuji Abe, Yamanashi, JP;
Tokyo Electron Limited, Tokyo, JP;
Abstract
According to the invention, each detecting element pair of a wafer detector is constituted by light-emitting and light-receiving elements of transmission-type and is arranged at a position corresponding to a fitting edge portion of one of a plurality of wafers. The number of detecting element pairs is equal to the number of wafers which can be stored in the wafer counter. Light emitted from a light-emitting element to a light-receiving element is kept substantially perpendicular to a surface of a wafer and is shielded when a wafer is engaged in a wafer counter. A change in the amount of light received by the light-receiving element is detected by a signal processor electrically connected to each of the detecting element pairs. The positions and number of a large number of wafers can be accurately and instantaneously detected with an extremely simple structure.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile