The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 20, 1989
Filed:
Oct. 30, 1985
Applicant:
Inventor:
Sheng T Hsu, West Windsor Township, Mercer County, NJ (US);
Assignee:
General Electric Company, Schenectady, NY (US);
Primary Examiner:
Int. Cl.
CPC ...
H01L / ;
U.S. Cl.
CPC ...
357 239 ; 357675 ; 357 20 ; 357 55 ; 357 54 ; 357 71 ;
Abstract
A semiconductor device and method of making is disclosed wherein the semiconductor device includes a MOSFET with very shallow source and drain regions. The high sheet resistivity normally associated with such shallow regions is obviated by growing an epitaxial layer directly from the surface of the shallow source and drain regions, highly doping the layer, then forming a layer of refractory metal silicide on the epitaxial layer. The resulting structure yields a MOSFET having very shallow source and drain regions with very low sheet resistance.