The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 28, 1989
Filed:
Jul. 08, 1987
John R Rudert, Jr, Fishkill, NY (US);
International Business Machines Corporation, Armonk, NY (US);
Abstract
A system and an algorithmic method are provided for scanning an electron beam in a predetermined pattern over a surface, which is partitioned into a matrix of sub-fields. The system includes an electron beam, and it determines the boundary portions of that pattern in a selected sub-field of the matrix which extends into the next sequential adjacent sub-fields in the same row and column as the selected sub-field. The coordinates of the pattern boundary portion in the selected and the adjacent sub-fields are stored in a memory. The electron beam scans over the surface for fully exposing the surface with all portions of the predetermined pattern within the selected sub-field, except for the boundary portions. Then the boundary portions in the currently selected sub-field are spliced, i.e. partially exposed, as are the boundary portions of the adjacent sub-fields which extend into the currently selected sub-field. Portions of the spliced data are stored in a buffer for use in computing the data for the corresponding adjacent sub-fields. Then the coordinates of the pattern boundary portions in the previously selected sub-fields are deleted from the memory.