The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 28, 1989
Filed:
Jul. 08, 1988
Applicant:
Inventor:
Toshitaka Fukushima, Yokohama, JP;
Assignee:
Fujitsu Limited, Kawasaki, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L / ; H01L / ;
U.S. Cl.
CPC ...
437 67 ; 437 68 ; 357 55 ;
Abstract
An isolation groove structure comprises a deep isolation groove having a cross section with substantially straight and parallel side wall portions and a generally V-shaped bottom portion, and a shallow isolation groove having a generally V-shaped cross section. The V-shaped bottom portion of the deep isolation groove and the shallow isolation groove being formed simultaneously by anisotropic etching.