The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 14, 1989
Filed:
Oct. 15, 1987
Applicant:
Inventors:
Guenther Harbeke, Affoltern am Alhis, CH;
Lubomir L Jastrzebski, Plainsboro, NJ (US);
Assignee:
General Electric Company, Schenectady, NY (US);
Primary Examiner:
Int. Cl.
CPC ...
G01J / ;
U.S. Cl.
CPC ...
374123 ;
Abstract
The present invention provides graphs and a method of using the graphs to determine the substrate temperature used during oxygen implantation of SIMOX wafers. The method establishes a relationship between the wavelength of minimum transmittance for infrared energy and the implantation temperature. Such relationships are then expressed, in the form of graphs, for various selected oxygen dose and energy levels.