The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 07, 1989
Filed:
Mar. 17, 1988
Makoto Kato, Kawasaki, JP;
Koichi Homma, Yokohama, JP;
Fuminobu Komura, Yokohama, JP;
Toshihiro Furuya, Katsuta, JP;
Hitachi, Ltd., Tokyo, JP;
Abstract
A scanning electron microscope for scanning the surface of a specimen with an electron beam to detect secondary electrons, backscattered electrons, or X-rays emitted from the specimen, thereby forming an image of the surface of the specimen, is provided with a specimen table capable of making a horizontal movement, a vertical movement a rotating operation and a tilting operation, an arithmetic unit for converting the output of a detector for detecting the secondary electrons, backscattered electrons or X-ray into a digital signal to store the digital signal, and for calculating the amount of each of the horizontal movement, vertical movement, rotating operation and tilting operation of the specimen table, on the basis of the stored information, an indication given from the outside, and others, and a controller for controlling the specimen table on the basis of a calculated value from the arithmetic unit.