The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 24, 1989
Filed:
Aug. 06, 1987
Applicant:
Inventors:
Syd R Wilson, Phoenix, AZ (US);
Robert P Lorigan, Phoenix, AZ (US);
Richard L Peterson, Phoenix, AZ (US);
Assignee:
Motorola Inc., Schaumburg, IL (US);
Attorneys:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G21K / ;
U.S. Cl.
CPC ...
738659 ; 2504922 ; 437 20 ;
Abstract
A method for determining silicon mass 28 beam purity prior to implanting gallium arsenide by implanting silicon in a silicon monitor wafer and analyzing the damage created by the implantation.