The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 03, 1989
Filed:
May. 21, 1987
Applicant:
Inventors:
Alfred Groeber, Gauting, DE;
Hans Hadersbeck, Munich, DE;
Fritz Mueller, Munich, DE;
Hubert Zukier, Munich, DE;
Hans J Hacke, Munich, DE;
Assignee:
Siemens Aktiengesellschaft, Berlin and Munich, US;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G03L / ;
U.S. Cl.
CPC ...
430314 ; 430316 ; 430318 ; 430329 ; 430394 ; 1566591 ; 1566611 ; 156664 ; 204 15 ;
Abstract
A method for the manufacture of fine structures for semiconductors were in a photographic structuring is carried out on both sides of a smooth, non-stressed metal tape. The tape is etched from both sides. A single sided metal deposition than takes place by means of a float type electroplating. Stabilization of the fine structure is achieved by depositing a lacquer or resin by an electrophoretic deposition or by electro-immersion lacquering. The insulator carrier is applied as one of the final steps of the process.