The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 20, 1988
Filed:
Jan. 05, 1987
Applicant:
Inventors:
Minoru Toriumi, Hachioji, JP;
Hiroshi Shiraishi, Hachioji, JP;
Ryotaro Irie, Tokyo, JP;
Shigeru Koibuchi, Hitachi, JP;
Assignee:
Hitachi Chemical Company, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03C / ; G03C / ;
U.S. Cl.
CPC ...
430196 ; 430165 ; 430167 ; 430191 ; 430192 ; 430197 ; 430325 ; 430326 ; 430330 ; 430331 ;
Abstract
A photosensitive composition comprising (a) a photosensitive component such as an aromatic diazo compound or an aromatic azide, (b) a polymer and (c) a quaternary alkylammonium salt wherein each straight- or branched-chain alkyl group has 1 to 7 carbon atoms is suitable for producing a positive type or negative type photresist excellent in contrast and sensitivity in the microlithography of semiconductor elements.