The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 13, 1988
Filed:
Apr. 27, 1987
Applicant:
Inventors:
Kanji Kinameri, Nishitama, JP;
Chusuke Munakata, Nishitama, JP;
Assignee:
Hitachi, Ltd., Tokyo, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01J / ;
U.S. Cl.
CPC ...
250226 ; 358107 ;
Abstract
The scanning photon microscope according to this invention relates the phase of the ac photovoltage or photocurrent signal to the hue of a color image and the amplitude of the signal to the brightness of the image in representing the signal distribution in the specimen in the form of a color image, in order to make a clear distinction between the amplitude and phase of the ac photovoltage or photocurrent induced in the specimen when irradiated with a photon beam, thus permitting detailed and multilateral analysis of the specimen's characteristics.