The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 06, 1988
Filed:
Mar. 17, 1987
Applicant:
Inventors:
Jan B Le Poole, Tucson, AZ (US);
Karel D Van der Mast, Pijnacker, NL;
Assignee:
U.S. Philips Corporation, New York, NY (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01J / ;
U.S. Cl.
CPC ...
250305 ; 250311 ;
Abstract
An apparatus for energy-selective visualization of a beam of charged particles emerging from an object is equipped with a double-focusing energy analyzer which is provided with a two-dimensional entrance diaphragm. For visualization of both an image and a spectrum, an optical imaging system behind the analyzer is preferably equipped with one or more quadrapole lenses. An illumination system for an object to be examined is preferably equipped with a system for a sequential partial illumination of the object.