The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 20, 1988
Filed:
Oct. 14, 1986
Gijsbertus Bouwhuis, Eindhoven, NL;
Antonius H Akkermans, Eindhoven, NL;
Guido C Van De Looy, Eindhoven, NL;
U.S. Philips Corp., New York, NY (US);
Abstract
A device is described for detecting a magnification error in an optical imaging system comprising a lens system (L.sub.1, L.sub.2) which is telecentric at one side. Two gratings (RG.sub.1, RG.sub.2) arranged in the object plane (MA) are imaged onto two gratings (WG.sub.1, WG.sub.2) arranged in the image plane (W; WT) and the radiation beams (b.sub.1, b.sub.2) by means of which these images are formed are incident on two radiation-sensitive detection systems (D.sub.1, D.sub.2) which supply periodic signals (S.sub.1, S.sub.2). By phase comparison of these signals a magnification error (S.sub.ME) and, if desired, a focussing error can be measured very accurately.