The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 16, 1988
Filed:
Aug. 06, 1987
Genshu Fuse, Hirakata, JP;
Kenji Tateiwa, Neyagawa, JP;
Ichiro Nakao, Kadoma, JP;
Hideaki Shimoda, Moriguchi, JP;
Matsushita Electric Industrial Co., Ltd., Kadoma, JP;
Abstract
Disclosed is a method for burying a step in a semiconductor substrate in which (1) SiO.sub.2 layer is formed on a lower part of the step, (2) photoresist layer with equal thickness to the height of the step on the SiO.sub.2 layer at a portion corresponding to the lower part of the step, (3) sputter-SiO.sub.2 layer is formed by sputtering on the photoresist layer and SiO.sub.2 layer, (4) another photoresist layer is formed on the sputter-SiO.sub.2 layer, (5) the another photoresist layer and sputter-SiO.sub.2 layer are removed, and (6) the SiO.sub.2 layer and photoresist layer are removed. By this method, semiconductor substrate with flatness of within 50 nm in a 6-inch wafer can be obtained.