The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 02, 1988
Filed:
Nov. 21, 1986
Yoshihisa Fujiwara, Nagareyama, JP;
Akikazu Tanimoto, Yokohama, JP;
Hisakazu Kato, Tokyo, JP;
Manabu Hosoya, Yokohama, JP;
Shinji Miura, Yokohama, JP;
Fuyuhiko Inoue, Sagamihara, JP;
Yuichi Aoki, Yokohama, JP;
Nippon Kogaku K.K., Tokyo, JP;
Abstract
In a pattern generating system for scanning a pattern on a surface of a workpiece with a laser beam modulated by drawing data so as to form a pattern corresponding to design pattern data, a plurality of through holes are formed at predetermined positions of the workpiece. Beams transmitted through the through holes are directed to a sensor for generating a detection output representing positions of the transmitted beams. A computer generates position data of the through holes on the basis of the detection output and calculates a positional error and a deformation amount of the workpiece. A correcting device corrects the drawing on the basis of the positional error and the deformation amount.