The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jul. 05, 1988

Filed:

Sep. 08, 1986
Applicant:
Inventors:

Peter D Scovell, Chelmsford, GB;

Roger L Baker, Chelmsford, GB;

David W McNeil, Harlow, GB;

Assignee:

STC PLC, London, GB;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L / ;
U.S. Cl.
CPC ...
437247 ; 437239 ; 437174 ; 437 31 ; 148D / ;
Abstract

In making bipolar transistors, an interfacial oxide layer (5) is formed over ther monocrystalline region (1), and polysilicon (6) is formed both thereon as an extrinsic emitter region. After doping the polysilicon a monocrystalline emitter region (4) is produced in the base region by diffusion from the extrinsic polysilicon emitter region. The oxide layer (5) acts as a diffusion barrier to ensure that excessive dopant does not reach the monocrystalline region. After the above operation, a thermal treatment is effected at a higher temperature, e.g. 1100.degree. C., for a few seconds, which breaks down the interfacial oxide layer referred to above. This temporary use of the interfacial oxide layer leads to better and more consistant transistor characteristics.


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