The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 05, 1988
Filed:
Oct. 08, 1986
Makoto Kato, Kawasaki, JP;
Tetsuo Yokoyama, Tokyo, JP;
Kaoru Momose, Tokyo, JP;
Toshihiro Furuya, Katsuta, JP;
Hitachi, Ltd., Tokyo, JP;
Abstract
Method of determining stereoscopic geometry of an object through photometric stereoscopic measurement with high accuracy. Three or more images of the object picked up in a same fixed direction by varying the state of light sources are derived. Relationships among the images are corrected so that an evaluation function determined by making use of redundancy of the images assumes a minimum value, to thereby prepare a reflectance map to be used in determining orientations of surface elements of the object. Through integration of the orientations, the surface shape of the object is determined. The method is applicable to the image processing in a scanning electron microscope.