The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 01, 1988
Filed:
Aug. 22, 1986
Christopher O Lada, Palo Alto, CA (US);
Raymond L Degner, Los Altos, CA (US);
Robert T LoBianco, Sunnyvale, CA (US);
Lam Research Corporation, Fremont, CA (US);
Abstract
A workpiece transfer apparatus includes a drive assembly and a transfer arm assembly. The transfer arm assembly is articulated, including a linking arm enclosure pivotally attached to a transfer arm. The linking arm enclosure is mounted on a rotatable sleeve, which in turn is mounted in a bearing assembly which is mountable in a housing. A shaft runs axially through the sleeve and terminates with a pulley within the linking arm enclosure. The transfer arm is coupled to the shaft so that rotation of the sleeve relative to the shaft causes articulation of the transfer arm assembly. A first motor causes rotation of the sleeve and the shaft simultaneously, which effects rotation of the transfer arm relative to the housing. A second motor rotates the sleeve relative to the shaft, causing translation of the transfer arm relative to the housing.