The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 09, 1988
Filed:
Dec. 12, 1986
Applicant:
Inventors:
Thomas E Wicker, Vallejo, CA (US);
Roger B Lachenbruch, Sausalito, CA (US);
Assignee:
Tegal Corporation, Novato, CA (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01H / ;
U.S. Cl.
CPC ...
361234 ;
Abstract
A wafer clamp is disclosed in which a high voltage capacitor is formed on a semiconductor wafer, which rests on a conductive support. The plates of the capacitor comprise a plurality of concentric rings formed on the surface of the wafer with alternate rings connected together.
Wicker, Thomas. (1988). Electrostatic wafer clamp (U.S. Patent No. 4724510). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/4724510
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile