The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 02, 1988
Filed:
Jun. 05, 1987
Toshio Matsuura, Koshigaya, JP;
Satoru Shikata, Kawasaki, JP;
Nippon Kogaku K.K., Tokyo, JP;
Abstract
A process and an apparatus for positioning a substrate provided with at least an alignment mark (reference pattern) and other patterns irrelevant to the alignment such as circuit patterns, are featured by obtaining photoelectric signals corresponding to the pattern distribution in a scanning area extending over a determined length in a scan direction crossing said reference pattern at a determined angle and containing the reference pattern, identifying that a photoelectric signal satisfying at least a condition in the scan direction is generated by the reference pattern and aligning the substrate according to thus identified photoelectric signal.