The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 05, 1988
Filed:
Sep. 15, 1986
Applicant:
Inventors:
Thomas L Strahl, Fremont, CA (US);
Lawrence T Lamont, Jr, San Jose, CA (US);
Carl T Peterson, Fremont, CA (US);
Hobart A Brown, Santa Cruz, CA (US);
Lonnie W McCormick, Cupertino, CA (US);
Roderick C Mosely, Mountain View, CA (US);
Assignee:
Machine Technology, Inc., Parsippany, NJ (US);
Primary Examiner:
Int. Cl.
CPC ...
C23C / ;
U.S. Cl.
CPC ...
2041921 ; 118720 ; 156643 ; 20419211 ; 20419212 ; 20419225 ; 204298 ; 427 34 ; 427 39 ; 437225 ;
Abstract
A method of processing a plurality of semiconductor wafers from a wafer cassette including a wafer transfer housing and one or more processing chambers. A wafer is removed from its cassette and transported through the transfer housing into one or more processing chambers for etching, deposition or other such operations. The processed wafer is replaced into its cassette after being transported back through the wafer transfer housing.
Published as: