The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Nov. 03, 1987

Filed:

Jan. 09, 1985
Applicant:
Inventors:

Livio Baldi, Tortona, IT;

Giuseppe Corda, Saronno, IT;

Giulio Iannuzzi, Vimercate, IT;

Danilo Re, Bernareggio, IT;

Giorgio De Santi, Milan, IT;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L / ; H01L / ;
U.S. Cl.
CPC ...
437 45 ; 148D / ; 357 42 ; 357 67 ; 437 57 ; 437200 ;
Abstract

The method provides for the formation of a layer of metal silicide on the gate layer of polycrystalline silicon and, for each transistor of the CMOS pair, the simultaneous doping of the active regions and the gate polycrystalline silicon. In the structure produced by this method, the gate electrodes are of polycrystalline silicon covered by metal silicide and the gate electrode of the n-channel transistor is doped with n-type material, while the gate electrode of the p-channel transistor is doped with p-type impurities. This enables the production of low threshold voltages for both transistors even in the case of very high integration densities.


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