The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 20, 1987
Filed:
Dec. 20, 1985
Applicant:
Inventor:
Nicholas J Szluk, Fort Collins, CO (US);
Assignee:
NCR Corporation, Dayton, OH (US);
Attorneys:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L / ;
U.S. Cl.
CPC ...
437 57 ; 437 44 ;
Abstract
A CMOS process incorporates self-aligned buried contacts, lightly doped source/drain structures, and sidewall oxide spacers. The process is tailored so that individual process steps and structural features serve several functions, thereby providing the desirable structural features and small geometry in conjunction with fast operational speeds, reduced Miller capacitance and short channel effects in a process of minimum complexity.