The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 01, 1987
Filed:
Aug. 25, 1986
Applicant:
Inventors:
Hiroyuki Hiraoka, Saratoga, CA (US);
Jeffrey W Labadie, Campbell, CA (US);
James H Lee, San Jose, CA (US);
Scott A MacDonald, San Jose, CA (US);
Carlton G Willson, San Jose, CA (US);
Assignee:
International Business Machines Corporation, Armonk, NY (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G03C / ; B05D / ;
U.S. Cl.
CPC ...
427343 ; 4273831 ; 4274198 ; 4272481 ; 156628 ; 430324 ; 430325 ; 430326 ; 430331 ;
Abstract
The reactive ion etching and thermal flow resistance of a resist image is enhanced by contacting the resist image with an alkyl metal compound of magnesium or aluminum.