The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 11, 1987
Filed:
Apr. 10, 1985
Wayne G Renken, San Jose, CA (US);
Dan B LeMay, Palos Verdes Estates, CA (US);
Ricardo M Takahashi, Ben Lomand, CA (US);
Innovus, San Jose, CA (US);
Abstract
A mass flowmeter and controller measures the mass flow rate of liquid or gaseous fluids and controls the flow rate of the fluids being utilized in a processing operation. A series of flow channels and blocked channels are micro-etched from a silicon substrate leaving an integral membrane suspended across the channels. A heater-sensor thin film resistor, diode or transistor is formed on the membranes and the substrate during manufacture to sense the temperature at particular locations. A cover housing matching channels and grooves forms flow and stagnant blocked conduits in the structure. Through a bridge circuit a signal indicative of mass flow is produced. This signal is passed to a control valve armature coil in an in-line flow control valve. The controller includes a sensor module containing monitored flow and blocked channels and passive by-pass channels as required for additional flow capacity, a control valve cartridge, an overall housing and the magnetic armature coil which controls the flow of fluid through the valve and the sensor module.