The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 28, 1987
Filed:
Nov. 02, 1984
Applicant:
Inventors:
Richard F Foulke, Carlisle, MA (US);
Steven M Lord, Malden, MA (US);
Assignee:
Proconics International, Inc., Woburn, MA (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
B65G / ;
U.S. Cl.
CPC ...
414416 ; 294 641 ; 294907 ; 414730 ; 414737 ; 269 21 ;
Abstract
Wafer transfer apparatus including a wafer-pickup element having suction openings closer to the edge of wafer than the wafer's center so that the wafer can be picked up with greater certainty as to the locations of the wafer edges, the pickup element being thin and made of a structural layer of rigid structural material having grooves and a TEFLON layer laminated to the structural layer and having suction openings, the grooves and covering portions of TEFLON defining vacuum passages.