The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 14, 1987
Filed:
Oct. 28, 1985
Applicant:
Inventors:
Murrae J Bowden, Summit, NJ (US);
Antoni S Gozdz, Princeton, NJ (US);
Assignee:
Bell Communications Research, Inc., Livingston, NJ (US);
Attorneys:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G03C / ; G03C / ;
U.S. Cl.
CPC ...
430270 ; 430296 ; 430942 ; 430326 ; 430311 ; 430331 ; 528 30 ; 528 32 ;
Abstract
Poly(alkenyltrialkylsilane sulfone)s have been found to be electron beam sensitive and suitable for use as positive resists in a two layer resist system. The described resists are prepared by the polymerization of an .omega.-alkenyltrimethylsilane with sulfur dioxide with or without a second solubilizing olefinic compound. The resultant composition evidences high sensitivity, excellent resolution characteristics and excellent resistance to oxygen reactive-ion etching.