The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Mar. 24, 1987

Filed:

Nov. 25, 1985
Applicant:
Inventors:

Yoichi Ino, Fuchu, JP;

Kazuo Kosuge, Fuchu, JP;

Assignee:

Anelva Corporation, Tokyo, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B01D / ;
U.S. Cl.
CPC ...
250281 ; 250288 ; 73753 ; 324460 ; 364558 ;
Abstract

A vacuum gauge includes a quadrupole mass spectrometer for measuring an ion current value of respective gas components, the Bayard-Alpart type ionization gauge for measuring an apparent total pressure value of the gas components, an arithmetic logic unit for calculating a predetermined equation so as to obtain concentration of the respective gas components and also measurement sensitivity of the respective gas components, whereby the apparent total pressure value is corrected, based upon the measurement sensitivity of the respective gas components, to derive a real total pressure value of the measured gas components.


Find Patent Forward Citations

Ino, Yoichi. (1987). Vacuum gauge (U.S. Patent No. 4652752). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/4652752

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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