The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 10, 1987
Filed:
Feb. 17, 1984
David G Brock, Mt. Kisco, NY (US);
John A Baumann, Ossining, NY (US);
Stauffer Chemical Company, Westport, CT (US);
Abstract
A method and apparatus are provided for producing fine quality pnictide films by vacuum evaporation and molecular beam deposition. A pnictide source, preferably phosphorous, is heated to produce a continuous supply of vapor species, preferably P.sub.4. The vapor species is cracked by a heated tungsten wire positioned adjacent the pnictide source to produce P.sub.2 molecules. A second tungsten wire cracker is located adjacent a substrate to prevent the recombination of P.sub.2 molecules into P.sub.4 molecules. The P.sub.2 molecules are deposited on the substrate and condense into amorphous pure phosphorous shiny red films. A separate source of alkali metal intercalate, preferably KC.sub.8, may also be heated to provide an alkali metal vapor for producing films of alkali metal polypnictide films, preferably KP.sub.x where x is equal to or greater than 15, to be deposited on the substrate. Fine quality films may also be deposited on a substrate by a molecular beam apparatus providing a continuous source of pnictide vapor species and a cracker disposed between the exit of a pnictide collimator and the substrate.