The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 13, 1987
Filed:
Oct. 04, 1983
Applicant:
Inventor:
T Charles Podvin, Poway, CA (US);
Assignee:
Micromanipulator Microscope Co., Inc., Escondidto, CA (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01B / ; G01B / ;
U.S. Cl.
CPC ...
356359 ; 350509 ; 356237 ;
Abstract
Transparent membranes are examined with a microscope having coaxial brightfield illumination fitted with a narrow bandwidth filter to convert polychromatic light from a source to substantially monochromatic light. Light reflecting off of the surfaces of the membrane recombine to create an interference pattern, including observable fringes in the region of membrane surface aberrations. Membranes which may be examined include pellicles used to cover photomasks and photo-resist layers. If a photo-resist layer is examined, a filter is selected to provide essentially monochromatic light at a wavelength to which the resist is insensitive.