The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 11, 1986
Filed:
Sep. 12, 1985
Applicant:
Inventor:
Gary M Gray, Pelham, AL (US);
Assignee:
J. T. Baker Chemical Company, Phillipsburg, NJ (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03C / ; G03C / ; G03F / ;
U.S. Cl.
CPC ...
430191 ; 430165 ; 430192 ; 430193 ; 430326 ; 534556 ;
Abstract
Positive deep ultra-violet photoresists which are base developable comprise base soluble polymers and as photosensitive solubilizing agents compounds of the formula ##STR1## wherein R.sup.1 and R.sup.2 can each individually be alkyl, aryl, alkoxy alkyl, aralkyl or haloalkyl radicals or R.sup.1 and R.sup.2 taken together can be an alkylene radical.