The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 28, 1986
Filed:
Feb. 28, 1986
Applicant:
Inventors:
Assignee:
Balzers Aktiengesellschaft, , LI;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C / ;
U.S. Cl.
CPC ...
20419231 ; 2041921 ; 204298 ; 427 38 ;
Abstract
For the vapor deposition of layers of oxides, nitrides, oxynitrides and carbides by ion plating, the surface to be coated is electrically insulated or mounted under insulation and during the coating an electric plasma is maintained in front of the surface to be coated, in such a way that the ion incidence density on the substrate is 0.5 to 2 mA per cm.sup.2 and the surface charges to a potential of -5 to -60 volts. Thereby especially hard and firmly adhering layers are obtained.