The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 14, 1986
Filed:
May. 01, 1984
Carlo LaFiandra, New Canaan, CT (US);
Justin Kreuzer, Trumbull, CT (US);
The Perkin-Elmer Corporation, Norwalk, CT (US);
Abstract
The present invention is directed, in an X-ray lithographic system characterized by a plurality of work stations, a cartridge, apparatus for mounting a wafer and a mask on the cartridge, a system for moving the cartridge between stations, apparatus in each of the stations for moving the cartridge to a kinematic mount, said kinematic mounts in all of said stations being substantially identical, to the improvement comprising: a bistable foot operable in a first linear elevational mode and in a second angular compliance mode.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile