The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 29, 1986
Filed:
Sep. 22, 1983
Applicant:
Inventors:
Richard J Hertel, Bradford, MA (US);
Leo V Klos, Newburyport, MA (US);
Assignee:
Varian Associates, Inc., Palo Alto, CA (US);
Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
B65D / ;
U.S. Cl.
CPC ...
206329 ; 206454 ;
Abstract
A multiple wafer holder generally of the size and shape of a standard wafer has on its front surface a plurality of pockets. The edge of each pocket is generally V-shaped and grooved so that wafers of different sizes can be carried by each holder and more than one wafer can be transported together into the processing chamber of an implanter from a cassette.