The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 22, 1986
Filed:
Dec. 09, 1983
Applicant:
Inventor:
Lee K Galbraith, Mountain View, CA (US);
Assignee:
Tencor Instruments, Mountain View, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01N / ;
U.S. Cl.
CPC ...
356237 ; 356430 ; 250563 ; 250572 ;
Abstract
A two-stage light collector, including a first stage which admits a scanning beam and a second stage which is optically connected to the first stage and has a light detector therein. The first stage has a shape which re-images diffusely scattered radiation from a target on which the radiation impinges. The first stage directs light toward an entrance aperture in the second stage which indirectly reflects light toward the detector associated with the second stage.