The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 01, 1986
Filed:
Oct. 07, 1983
Tsuneo Terasawa, Hachioji, JP;
Shinji Kuniyoshi, Suginami, JP;
Akihiro Takanashi, Kokubunji, JP;
Toshiei Kurosaki, Edogawa, JP;
Yoshio Kawamura, Koutou, JP;
Sumio Hosaka, Nishitama, JP;
Hitachi, Ltd., Tokyo, JP;
Abstract
A pattern detector according to the present invention adopts a processing method wherein means is provided anew with which the intensity distribution of light reflected from or transmitted through an illuminated specimen is photoelectrically converted, and a pattern position is detected at high speed from the ratio between the primary moment and integral value of a detection signal thus derived, whereupon a symmetry calculation is executed within a narrow range around the detected value, whereby the pattern position is found fast and precisely.