The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 03, 1986
Filed:
Jan. 23, 1985
Applicant:
Inventors:
Werner Tabarelli, Furstentum, LI;
Herbert E Mayer, Furstentum, LI;
Assignee:
Perkin-Elmer Censor Anstalt, Vaduz, LI;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G03B / ;
U.S. Cl.
CPC ...
355 43 ; 355 53 ; 355 45 ; 356401 ; 250548 ;
Abstract
For a device for projection copying of masks on a semiconductor substrate for the manufacture of integrated circuits, it is intended that the copying of an adjusting mark of the workpiece onto a sensor takes place by means of the projection lens, whereby the directly reflected beams of the light which makes visible the adjusting mark are masked out by a mirror, and the position-sensitive sensor is fastened at the underside of the frame carrying the mask.