The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 29, 1986
Filed:
Mar. 11, 1985
Jer-shen Maa, Plainsboro Township, Middlesex County, NJ (US);
RCA Corporation, Princeton, NJ (US);
Abstract
A process of forming conductive lines of fine dimensions over a substrate having topographical features without the formation of conductive stringers is disclosed. Openings of the desired dimensions overlying the topographical features are lithographically defined in a layer of planarizing dielectric material deposited on the substrate. A layer of doped silicon is deposited thereover and isotropically etched to remove all except for the portion in the openings in the dielectric layer. A layer of metal is deposited to overlie only the silicon in the openings in the dielectric layer. The structure is annealed to convert the metal to metal silicide and the remaining dielectric layer is removed.