The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 08, 1986
Filed:
Sep. 19, 1984
Applicant:
Inventors:
Frithjof Asmussen, Berlin, DE;
Peter Quis, Darmstadt, DE;
Winfried Wunderlich, Rossdorf, DE;
Wolfram Schnabel, Berlin, DE;
Hideto Sotobayashi, Berlin, DE;
Assignee:
Rohm GmbH, Darmstadt, DE;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C08F / ;
U.S. Cl.
CPC ...
524302 ; 522118 ; 427 36 ; 427 38 ; 524303 ; 524392 ; 430286 ; 430325 ;
Abstract
A radiation sensitive polymeric material comprising a copolymer of methyl methacrylate and allyl methacrylate and at least one organosulfur compound having at least two --SH groups per molecule, said material being useful as a polymer resist sensitive to high energy radiation.