The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 03, 1985
Filed:
Oct. 14, 1983
Clark Bergman, Roseville, MN (US);
Gary E Vergason, Minneapolis, MN (US);
William Allen, River Falls, WI (US);
Michael F Reed, Coon Rapids, MN (US);
Multi-Arc Vacuum Systems Inc., St. Paul, MN (US);
Abstract
An improved electric arc vapor deposition source plate mounting assembly (8) is disclosed. The source plate assembly is formed of a plurality of cooperatively mating sections (12, 22 and 24) that are secured to one another by fastening members (30, 32). The innermost section (24) carries an electrode (26) of coating source material. Insulator seal rings (56, 58) electrically isolate the mating sections (12, 22 and 24) from one another while forming a vacuum seal between the respective mating members. The insulator seal rings (56, 58) have two adjoining sections annularly displaced from one another such that the rings are self-centering between the respective mating members. The insulator rings preferably have a substantially L-shaped cross-section and include an enlarged bulge portion (61) for improved sealing characteristics. The insulator seal members enable the mating components of the source plate assembly to be operatively mounted in close proximity to one another such that coating particles do not contaminate the seal members. A spacer member (53) further protects one of the seal members (58) from wandering cathode spot damage. The source plate assembly (8) includes hinges (14) for enabling ease of maintenance of the assembly and the cathode source (26). The source plate assembly includes a permanent magnet (54) for controlling spot movement, and improved liquid coolant flow paths (23, 64) for cooling the assembly.