The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 08, 1985
Filed:
Nov. 03, 1983
Applicant:
Inventors:
Masatsugu Izu, Birmingham, MI (US);
David A Gattuso, Pontiac, MI (US);
Assignee:
Sovonics Solar Systems, Solin, OH (US);
Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
F26B / ;
U.S. Cl.
CPC ...
34155 ; 34242 ; 432242 ; 118733 ;
Abstract
A valve for isolating the interior of a glow discharge chamber from the atmosphere and other reactants. The valve includes a body mounted in an aperture of the chamber. A slit-like opening is provided therein to allow the interior of the chamber to communicate with interrelated elements of a deposition system. A source is provided for introducing inert gas into the opening under pressure somewhat greater than that of reaction gases and plasma within the chamber to create an effective, non-reactive gas curtain.