The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 23, 1985
Filed:
Nov. 28, 1983
Applicant:
Inventors:
Assignee:
Canon Kabushiki Kaisha, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03B / ;
U.S. Cl.
CPC ...
355 53 ; 355 77 ;
Abstract
A mask aligner for stepping and exposing a wafer in accordance with a shot arrangement, including an input device to which wafer dimension, chip dimension and a chip pattern for one shot are inputted, a selector for selecting a shot arrangement mode from plural shot arrangement modes based on the above input signals, a controller for effecting the shots in accordance with the selected modes to minimize the time required for exposing the one entire wafer or to maximize the number of chips exposed per unit.