The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 19, 1985
Filed:
Jan. 19, 1984
Applicant:
Inventors:
Nobuyoshi Kobayashi, Hachioji, JP;
Seiichi Iwata, Sayama, JP;
Naoki Yamamoto, Kawaguchi, JP;
Hitoshi Matsuo, Kokubunji, JP;
Teiichi Homma, Koutou, JP;
Assignee:
Hitachi, Ltd., Tokyo, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L / ; H01L / ;
U.S. Cl.
CPC ...
29578 ; 29571 ; 29591 ; 148-15 ; 148187 ; 357 67 ; 357 239 ;
Abstract
A silicon wafer having a tungsten and/or molybdenum film formed on its surface is heat-treated in hydrogen containing water vapor. Thus, silicon can be selectively oxidized without substantially oxidizing tungsten and/or molybdenum.