The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 12, 1985
Filed:
Oct. 06, 1982
Applicant:
Inventors:
Lawrence B Hill, Short Hills, NJ (US);
Dennis Garbis, Dix Hills, NY (US);
Robert C Heller, Stonybrook, NY (US);
Amedeo J Granata, Flushing, NY (US);
Assignee:
General Instrument Corp., Clifton, NJ (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H05B / ;
U.S. Cl.
CPC ...
219 / ; 219 1067 ; 219354 ; 118725 ; 118728 ; 118 501 ;
Abstract
A susceptor for use in a chemical vapor deposition process in a radiant absorption heating system comprises a heater adapted to absorb radiant energy and a sheath of high purity quartz completely surrounding the heater. The sheath further comprises dimples inside the sheath spacing the sheath from the heater. The heater may be graphite having a substantially pinhole-free outgas-inhibiting outer-coating such as silicon carbide.
Published as: