The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 01, 1985
Filed:
Feb. 18, 1983
Applicant:
Inventors:
Norio Koike, Fukaya, JP;
Takeo Ito, Fukaya, JP;
Shingo Watanabe, Himeji, JP;
Kunihiro Ikari, Yokosuka, JP;
Assignee:
Tokyo Shibaura Denki Kabushiki Kaisha, Kanagawa, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03C / ; G03C / ; G03F / ;
U.S. Cl.
CPC ...
430176 ; 430 28 ; 430165 ; 430167 ; 430177 ; 430179 ; 430196 ; 430197 ; 430272 ;
Abstract
Photoresist compositions based upon a water-soluble polymer are disclosed together with a water-soluble bisazide compound as a cross-linker, a water-soluble adhesion-improving diazo compound are characterized in that a water-soluble silane compound is included. The compositions are photosensitive, particularly to ultraviolet rays, and adhere well to the substrates to which they are applied. The compositions of the invention are used as photoresists.