The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 25, 1984
Filed:
Jun. 16, 1982
Applicant:
Inventor:
Robert G Mazur, Monroeville, PA (US);
Assignee:
Solid State Measurements, Inc., Monroeville, PA (US);
Attorneys:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
B24B / ;
U.S. Cl.
CPC ...
51161 ;
Abstract
An apparatus for abrading workpieces, particularly a semiconductor wafer, includes a spinner plate having acentral support and a finger pocket at one end to rotate the plate about a collar that is affixed to the central part of an abrading plate. The spinner plate carries at its end opposite the finger pocket, a fixture used to support the workpiece for movement along a circular track on the abrading plate. The abrading plate is supported within a tray.