The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 20, 1984
Filed:
Dec. 22, 1982
Robert A Magee, Poughkeepsie, NY (US);
Lawrence P Remsen, Stanfordville, NY (US);
International Business Machines Corporation, Armonk, NY (US);
Abstract
A system for cleaning material from a surface of an object, such as an MLC mask, having movable support member having extended along its length a line of liquid dispensing nozzles and a line of gas dispensing ports for respectively cleaning and drying the surface. The liquid dispensing nozzles and said gas dispensing ports are arranged to respectively provide a continuous line of liquid spray and a continuous line of gas at an angle with respect to the surface so as to form a wedge therewith in the direction of motion of the movable support member. The nozzles and ports are preferably arranged on both sides of the object to simultaneously clean both sides. The support member is moved vertically with respect to the surface by an air cylinder. The vertical movement of the respective lines of nozzles and ports so that said liquid dispensing nozzles act to provide said continuous line of liquid spray to remove said material from said surface when said line of spray is moved vertically across said surface and said gas dispensing ports subsequently act to provide said continuous line of gas to remove the liquid from the surface when the line of gas is moved vertically across the surface. The material and liquid are deposited below the surface for collection and removal.