The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 14, 1984
Filed:
Jul. 13, 1982
Applicant:
Inventors:
Takumi Ueno, Hachioji, JP;
Hiroshi Shiraishi, Hachioji, JP;
Takao Iwayanagi, Nerima, JP;
Takahiro Kohashi, Tsukui, JP;
Saburo Nonogaki, Meguro, JP;
Assignee:
Hitachi, Ltd., Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03F / ; G03F / ; G03F / ; H01L / ;
U.S. Cl.
CPC ...
430296 ; 430195 ; 430197 ; 430300 ; 430302 ; 430313 ; 430317 ; 430318 ; 430323 ; 430325 ; 430329 ; 430330 ; 430309 ; 430927 ; 430967 ; 156643 ;
Abstract
A radiation-sensitive composition comprising an iodine-containing azide compound at least a part of which can be fixed substantially in a polymer by exposure to a radiation and a polymer, or a radiation-sensitive composition comprising an azide compound, an iodine compound at least a part of which can be fixed substantially in a polymer by exposure to a radiation and a polymer. This composition can be subjected to the dry development with oxygen plasma after the exposure followed by heating.