The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 31, 1984
Filed:
Dec. 03, 1982
Henry J Geipel, Jr, Essex Junction, VT (US);
Ronald R Troutman, Essex Junction, VT (US);
John M Wursthorn, Underhill Center, VT (US);
International Business Machines Corporation, Armonk, NY (US);
Abstract
A simple process is provided which forms a bulk CMOS structure by depositing a layer of material which resists oxidation, e.g., a barrier layer of silicon nitride on an N- semiconductor substrate, forming a P well in the substrate through a given segment of the barrier layer, removing a first segment of the barrier layer to form N+ regions for N channel source and drain and N- substrate contact, removing a second segment of the barrier layer to form a P+ field region, removing a third segment of the barrier layer to form P+ regions for source and drain of a P channel device, forming a first control electrode having a given work function for the P channel device which acts as an ion barrier and then forming a second control electrode between the N channel source and drain regions having a work function different from that of the first control electrode.