The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 03, 1984
Filed:
Mar. 11, 1982
Applicant:
Inventors:
John J Zasio, Sunnyvale, CA (US);
Michael W Samuels, San Jose, CA (US);
Assignee:
Fujitsu, Limited, Kawasaki, JP;
Primary Examiner:
Int. Cl.
CPC ...
B01J / ; B23P / ;
U.S. Cl.
CPC ...
219 68 ; 219 / ; 2191 / ; 219 / ; 269903 ; 29586 ; 29584 ;
Abstract
An electrical discharge is applied to a wafer mounted in a wafer holder. The wafer includes at least one conducting region covered by an insulating layer. The discharge causes a conductive channel from the conductive region through the insulating layer. The conductive channel provides a relatively low impedance path suitable for conducting away electrons which are injected into the region during processing steps such as electron beam exposure.