The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 28, 1984
Filed:
Nov. 30, 1981
Applicant:
Inventor:
William R Wheeler, Saratoga, CA (US);
Assignee:
Tencor Instruments, Mountain View, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B25B / ;
U.S. Cl.
CPC ...
269 14 ; 269 21 ; 269903 ;
Abstract
A wafer chuck and a wafer loading and unloading system wherein a flat support surface of the chuck has a plurality of peaks and valleys, with the peaks minimizing contact with the wafer, yet having sufficient contact area for wafer support without deformation. The peaks are provided with a top edge serving to dislodge particles from a wafer surface when loading the wafer onto the chuck. The loading system includes wafer pushing members for bringing a wafer to a desired position on the support surface.